Thin film microelectronics : the preparation and properties of components and circuit arrays /
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| Other Authors: | |
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| Format: | Book |
| Language: | English |
| Published: |
London :
Chapman and Hall,
1965.
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| Series: | High vacuum series
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| Subjects: |
| Physical Description: | 284 p. : ill. ; 25 cm. |
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| Bibliography: | Includes bibliographies. |