Modern optical characterization techniques for semiconductors and semiconductor devices /

Modern optical characterization techniques for semiconductors and semiconductor devices /

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Bibliographic Details
Corporate Authors: Society of Photo-optical Instrumentation Engineers (U.S.), Metallurgical Society (U.S.)
Other Authors: Glembocki, O. J., Pollak, Fred H., Song, J. J.
Format: Book
Language:English
Published: Bellingham, Wash., USA : SPIE--the International Society for Optical Engineering, c1987.
Series:Proceedings of SPIE--the International Society for Optical Engineering ; v. 794
Subjects:
Thin film devices > Congresses.
Thin films > Optical properties > Congresses.
Description
Item Description:"26-27 March 1987, Bay Point, Florida."
Physical Description:vi, 282 p. : ill. ; 28 cm.
Bibliography:Includes bibliographies and index.
ISBN:089252829X (pbk.)

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