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01553nam a2200325 a 4500 |
| 001 |
c000072582 |
| 003 |
CARM |
| 005 |
00000000000000.0 |
| 008 |
880202s1987 waua b 10100 eng |
| 019 |
1 |
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|a 5681214
|5 LACONCORD2021
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| 020 |
|
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|a 089252829X (pbk.)
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| 035 |
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|a (OCoLC)16637798
|5 LACONCORD2021
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| 050 |
0 |
0 |
|a TK7872.T55
|b M63 1987
|
| 245 |
0 |
0 |
|a Modern optical characterization techniques for semiconductors and semiconductor devices /
|c O.J. Glembocki, Fred H. Pollak, J.J. Song, chairs/editors ; sponsored by SPIE--the International Society for Optical Engineering ; cooperating sponsor, the Metallurgical Society.
|
| 260 |
|
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|a Bellingham, Wash., USA :
|b SPIE--the International Society for Optical Engineering,
|c c1987.
|
| 300 |
|
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|a vi, 282 p. :
|b ill. ;
|c 28 cm.
|
| 440 |
|
0 |
|a Proceedings of SPIE--the International Society for Optical Engineering ;
|v v. 794
|
| 500 |
|
|
|a "26-27 March 1987, Bay Point, Florida."
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| 504 |
|
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|a Includes bibliographies and index.
|
| 650 |
|
0 |
|a Thin film devices
|x Congresses.
|
| 650 |
|
0 |
|a Thin films
|x Optical properties
|x Congresses.
|
| 700 |
1 |
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|a Glembocki, O. J.
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| 700 |
1 |
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|a Pollak, Fred H.
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| 700 |
1 |
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|a Song, J. J.
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| 710 |
2 |
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|a Society of Photo-optical Instrumentation Engineers (U.S.)
|
| 710 |
2 |
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|a Metallurgical Society (U.S.)
|
| 852 |
8 |
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|b CARM
|h A3:AB09C3
|i D01846
|p 0094559
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| 082 |
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|a 621.381/7
|2 19
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|s c44cabc2-c2d9-5720-8ba9-7ef6511249cc
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| 952 |
f |
f |
|p Can circulate
|a CAVAL
|b CAVAL
|c CAVAL
|d CARM 1 Store
|e D01846
|f A3:AB09C3
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|i book
|m 0094559
|