rdf-syntax-grammar
mods:
  schema location: http://www.loc.gov/mods/v3 http://www.loc.gov/standards/mods/v3/mods-3-2.xsd
  title info:
    title: Modern optical characterization techniques for semiconductors and semiconductor devices
  name:
    name part: Glembocki, O. J.
  name:
    name part: Pollak, Fred H.
  name:
    name part: Song, J. J.
  name:
    name part: Society of Photo-optical Instrumentation Engineers (U.S.)
  name:
    name part: Metallurgical Society (U.S.)
  type of resource: text
  genre: bibliography
  genre: conference publication
  origin info:
    place:
      place term: wau
    place:
      place term: Bellingham, Wash., USA
    publisher: SPIE--the International Society for Optical Engineering
    date issued: c1987
    date issued: 1987
    issuance: monographic
  language:
    language term: eng
  physical description:
    form: print
    extent: vi, 282 p. : ill. ; 28 cm.
  note: O.J. Glembocki, Fred H. Pollak, J.J. Song, chairs/editors ; sponsored by SPIE--the International Society for Optical Engineering ; cooperating sponsor, the Metallurgical Society.
  note: "26-27 March 1987, Bay Point, Florida."
  note: Includes bibliographies and index.
  subject:
    topic: Thin film devices
    topic: Congresses
  subject:
    topic: Thin films
    topic: Optical properties
    topic: Congresses
  classification: TK7872.T55 M63 1987
  classification: 621.381/7
  related item:
    title info:
      title: Proceedings of SPIE--the International Society for Optical Engineering ; v. 794
  identifier: 089252829X (pbk.)
  location:
    physical location: CARM
  record info:
    record creation date: 880202
    record change date: 00000000000000.0
    record identifier: c000072582