Modern optical characterization techniques for semiconductors and semiconductor devices /

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書目詳細資料
Corporate Authors: Society of Photo-optical Instrumentation Engineers (U.S.), Metallurgical Society (U.S.)
其他作者: Glembocki, O. J., Pollak, Fred H., Song, J. J.
格式: 圖書
語言:English
出版: Bellingham, Wash., USA : SPIE--the International Society for Optical Engineering, c1987.
叢編:Proceedings of SPIE--the International Society for Optical Engineering ; v. 794
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索引號: A3:AB09C3 D01846
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