Micromechanical sensors, actuators, and systems : presented at the Winter Annual Meeting of the American Society of Mechanical Engineers, Atlanta, Georgia, December 1-6, 1991 /

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Bibliographic Details
Corporate Authors: American Society of Mechanical Engineers. Winter Meeting, American Society of Mechanical Engineers. Dynamic Systems and Control Division, American Society of Mechanical Engineers. Heat Transfer Division, American Society of Mechanical Engineers. Advanced Energy Systems Division
Other Authors: Cho, D.
Format: Book
Language:English
Published: New York, N.Y. : ASME, c1991.
Series:DSC (Series) ; vol. 32.
Subjects:
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245 0 0 |a Micromechanical sensors, actuators, and systems :  |b presented at the Winter Annual Meeting of the American Society of Mechanical Engineers, Atlanta, Georgia, December 1-6, 1991 /  |c sponsored by the Dynamic Systems and Control Division, the Heat Transfer Division, and the Advanced Energy Systems Division, ASME ; edited by D. Cho ... [et al.]. 
260 |a New York, N.Y. :  |b ASME,  |c c1991. 
300 |a vi, 362 p. :  |b ill. ;  |c 26 cm. 
490 1 |a DSC ;  |v vol. 32 
504 |a Includes bibliographical references and index. 
650 0 |a Microelectronics  |x Congresses. 
650 0 |a Micromechanics  |x Congresses. 
650 0 |a Detectors  |x Congresses. 
650 0 |a Actuators  |x Congresses. 
700 1 |a Cho, D. 
710 2 0 |a American Society of Mechanical Engineers.  |b Winter Meeting  |d (1991 :  |c Atlanta, Ga.) 
710 2 0 |a American Society of Mechanical Engineers.  |b Dynamic Systems and Control Division. 
710 2 0 |a American Society of Mechanical Engineers.  |b Heat Transfer Division 
710 2 0 |a American Society of Mechanical Engineers.  |b Advanced Energy Systems Division. 
830 0 |a DSC (Series) ;  |v vol. 32. 
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