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| LEADER |
06014nam a2200841 a 4500 |
| 001 |
c000148169 |
| 003 |
CARM |
| 005 |
00000000000000.0 |
| 008 |
810325m19819999nyua b 001 0 eng |
| 010 |
|
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|a 81002877 //r864
|
| 019 |
1 |
|
|a 23898538
|z 1973671
|5 LACONCORD2021
|
| 020 |
|
|
|a 0122341015 (v. 1 : alk. paper)
|
| 035 |
|
|
|a (OCoLC)7462403
|5 LACONCORD2021
|
| 050 |
0 |
0 |
|a TK7874
|b .V56
|
| 082 |
0 |
0 |
|a 621.395 s
|2 19
|
| 245 |
0 |
0 |
|a VLSI electronics :
|b microstructure science /
|c edited by Norman G. Einspruch.
|
| 260 |
|
|
|a New York :
|b Academic Press,
|c 1981-c1993.
|
| 300 |
|
|
|a v. <1-19, 21-24> :
|b ill. ;
|c 24 cm.
|
| 500 |
|
|
|a Vols. 11-<16 > have imprint: Orlando : Academic Press; v. 17-<19, 21-24> : San Diego : Academic Press.
|
| 500 |
|
|
|a Beginning with vol. 6, some vols. edited by Norman G. Einspruch with other editors.
|
| 504 |
|
|
|a Includes bibliographies and indexes.
|
| 505 |
1 |
|
|a v. 1-5. [without special titles] -- v. 6. Materials and process characterization -- v. 7. [without special title] -- v. 8. Plasma processing for VLSI -- v. 9. [without special title] -- v. 10. Surface and interface effects in VLSI -- v. 11. GaAs microelectronics -- v. 12. Silicon materials -- v. 13. Metal-semiconductor contacts and devices -- v. 14. VLSI design -- v. 15. VLSI metallization -- v. 16. Lithography for VLSI -- v. 17. VLSI in medicine -- v.18. Advanced MOS device physics -- 19. Advanced CMOS process technology -- v. 21. Beam processing technologies -- v. 22. VLSI reliability -- v. 23. Application specific integrated circuit (ASIC) technology -- v. 24. Heterostructures and quantum devices.
|
| 650 |
|
0 |
|a Integrated circuits
|x Very large scale integration.
|
| 700 |
1 |
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|a Einspruch, Norman G.
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| 852 |
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|b CARM
|h A2:AK02E0
|i C03952
|p 0201603
|f BK
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| 852 |
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|b CARM
|h A2:AK06F0
|i C03940
|p 0201612
|f BK
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| 852 |
8 |
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|b CARM
|h A2:AK06F0
|i C03940
|p 0201613
|f BK
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| 852 |
8 |
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|b CARM
|h A2:AK06F0
|i C03940
|p 0201614
|f BK
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| 852 |
8 |
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|b CARM
|h A2:AK06F0
|i C03940
|p 0201615
|f BK
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| 852 |
8 |
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|b CARM
|h A2:AK06F0
|i C03940
|p 0201616
|f BK
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|b CARM
|h A2:AK06F0
|i C03940
|p 0201617
|f BK
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| 852 |
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|b CARM
|h A2:AK06F0
|i C03940
|p 0201618
|f BK
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| 852 |
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|b CARM
|h A2:AK06F0
|i C03940
|p 0201619
|f BK
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| 852 |
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|b CARM
|h A2:AK06F0
|i C03940
|p 0201620
|f BK
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| 852 |
8 |
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|b CARM
|h A2:AK06F0
|i C03940
|p 0201621
|f BK
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| 852 |
8 |
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|b CARM
|h A2:AK02E0
|i C03952
|p 0201604
|f BK
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| 852 |
8 |
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|b CARM
|h A2:AK06F0
|i C03940
|p 0201622
|f BK
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| 852 |
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|b CARM
|h A2:AK06F0
|i C03940
|p 0201623
|f BK
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| 852 |
8 |
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|b CARM
|h A2:AK06F0
|i C03940
|p 0201624
|f BK
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| 852 |
8 |
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|b CARM
|h A2:AK06F0
|i C03940
|p 0201625
|f BK
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| 852 |
8 |
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|b CARM
|h A2:AK06F0
|i C03940
|p 0201626
|f BK
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| 852 |
8 |
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|b CARM
|h A2:AK02E0
|i C03952
|p 0201605
|f BK
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| 852 |
8 |
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|b CARM
|h A2:AK02E0
|i C03952
|p 0201606
|f BK
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| 852 |
8 |
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|b CARM
|h A2:AK02E0
|i C03952
|p 0201607
|f BK
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| 852 |
8 |
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|b CARM
|h A2:AK02E0
|i C03952
|p 0201608
|f BK
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| 852 |
8 |
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|b CARM
|h A2:AK06F0
|i C03940
|p 0201609
|f BK
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| 852 |
8 |
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|b CARM
|h A2:AK06F0
|i C03940
|p 0201610
|f BK
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| 852 |
8 |
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|b CARM
|h A2:AK06F0
|i C03940
|p 0201611
|f BK
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| 999 |
f |
f |
|i 8feaefb2-8fb7-5f9a-b811-0ad59d476c9a
|s 82338f06-ca8f-5e62-8e09-79e5dfb94a0e
|
| 952 |
f |
f |
|p Can circulate
|a CAVAL
|b CAVAL
|c CAVAL
|d CARM 1 Store
|e C03940
|f A2:AK06F0
|h Other scheme
|i book
|j v.7 held
|m 0201609
|
| 952 |
f |
f |
|p Can circulate
|a CAVAL
|b CAVAL
|c CAVAL
|d CARM 1 Store
|e C03940
|f A2:AK06F0
|h Other scheme
|i book
|j v.8 held
|m 0201610
|
| 952 |
f |
f |
|p Can circulate
|a CAVAL
|b CAVAL
|c CAVAL
|d CARM 1 Store
|e C03940
|f A2:AK06F0
|h Other scheme
|i book
|j v.19 held
|m 0201621
|
| 952 |
f |
f |
|p Can circulate
|a CAVAL
|b CAVAL
|c CAVAL
|d CARM 1 Store
|e C03940
|f A2:AK06F0
|h Other scheme
|i book
|j v.18 held
|m 0201620
|
| 952 |
f |
f |
|p Can circulate
|a CAVAL
|b CAVAL
|c CAVAL
|d CARM 1 Store
|e C03940
|f A2:AK06F0
|h Other scheme
|i book
|j v.15 held
|m 0201617
|
| 952 |
f |
f |
|p Can circulate
|a CAVAL
|b CAVAL
|c CAVAL
|d CARM 1 Store
|e C03940
|f A2:AK06F0
|h Other scheme
|i book
|j v.13 held
|m 0201615
|
| 952 |
f |
f |
|p Can circulate
|a CAVAL
|b CAVAL
|c CAVAL
|d CARM 1 Store
|e C03940
|f A2:AK06F0
|h Other scheme
|i book
|j v.17 held
|m 0201619
|
| 952 |
f |
f |
|p Can circulate
|a CAVAL
|b CAVAL
|c CAVAL
|d CARM 1 Store
|e C03940
|f A2:AK06F0
|h Other scheme
|i book
|j v.21 held
|m 0201623
|
| 952 |
f |
f |
|p Can circulate
|a CAVAL
|b CAVAL
|c CAVAL
|d CARM 1 Store
|e C03940
|f A2:AK06F0
|h Other scheme
|i book
|j v.10 held
|m 0201612
|
| 952 |
f |
f |
|p Can circulate
|a CAVAL
|b CAVAL
|c CAVAL
|d CARM 1 Store
|e C03952
|f A2:AK02E0
|h Other scheme
|i book
|j v.1 held
|m 0201603
|
| 952 |
f |
f |
|p Can circulate
|a CAVAL
|b CAVAL
|c CAVAL
|d CARM 1 Store
|e C03940
|f A2:AK06F0
|h Other scheme
|i book
|j v.11 held
|m 0201613
|
| 952 |
f |
f |
|p Can circulate
|a CAVAL
|b CAVAL
|c CAVAL
|d CARM 1 Store
|e C03940
|f A2:AK06F0
|h Other scheme
|i book
|j v.22 held
|m 0201624
|
| 952 |
f |
f |
|p Can circulate
|a CAVAL
|b CAVAL
|c CAVAL
|d CARM 1 Store
|e C03940
|f A2:AK06F0
|h Other scheme
|i book
|j v.20 held
|m 0201622
|
| 952 |
f |
f |
|p Can circulate
|a CAVAL
|b CAVAL
|c CAVAL
|d CARM 1 Store
|e C03952
|f A2:AK02E0
|h Other scheme
|i book
|j v.3 held
|m 0201605
|
| 952 |
f |
f |
|p Can circulate
|a CAVAL
|b CAVAL
|c CAVAL
|d CARM 1 Store
|e C03940
|f A2:AK06F0
|h Other scheme
|i book
|j v.16 held
|m 0201618
|
| 952 |
f |
f |
|p Can circulate
|a CAVAL
|b CAVAL
|c CAVAL
|d CARM 1 Store
|e C03952
|f A2:AK02E0
|h Other scheme
|i book
|j v.5 held
|m 0201607
|
| 952 |
f |
f |
|p Can circulate
|a CAVAL
|b CAVAL
|c CAVAL
|d CARM 1 Store
|e C03952
|f A2:AK02E0
|h Other scheme
|i book
|j v.6 held
|m 0201608
|
| 952 |
f |
f |
|p Can circulate
|a CAVAL
|b CAVAL
|c CAVAL
|d CARM 1 Store
|e C03940
|f A2:AK06F0
|h Other scheme
|i book
|j v.23 held
|m 0201625
|
| 952 |
f |
f |
|p Can circulate
|a CAVAL
|b CAVAL
|c CAVAL
|d CARM 1 Store
|e C03952
|f A2:AK02E0
|h Other scheme
|i book
|j v.2 held
|m 0201604
|
| 952 |
f |
f |
|p Can circulate
|a CAVAL
|b CAVAL
|c CAVAL
|d CARM 1 Store
|e C03952
|f A2:AK02E0
|h Other scheme
|i book
|j v.4 held
|m 0201606
|
| 952 |
f |
f |
|p Can circulate
|a CAVAL
|b CAVAL
|c CAVAL
|d CARM 1 Store
|e C03940
|f A2:AK06F0
|h Other scheme
|i book
|j v.14 held
|m 0201616
|
| 952 |
f |
f |
|p Can circulate
|a CAVAL
|b CAVAL
|c CAVAL
|d CARM 1 Store
|e C03940
|f A2:AK06F0
|h Other scheme
|i book
|j v.9 held
|m 0201611
|
| 952 |
f |
f |
|p Can circulate
|a CAVAL
|b CAVAL
|c CAVAL
|d CARM 1 Store
|e C03940
|f A2:AK06F0
|h Other scheme
|i book
|j v.24 held
|m 0201626
|
| 952 |
f |
f |
|p Can circulate
|a CAVAL
|b CAVAL
|c CAVAL
|d CARM 1 Store
|e C03940
|f A2:AK06F0
|h Other scheme
|i book
|j v.12 held
|m 0201614
|