APA-Zitierstil (7. Ausg.)

American Chemical Society. Division of Organic Coatings and Plastics Chemistry, American Chemical Society. Meeting, Thompson, L. F., Willson, C. G., & Bowden, M. J. (1983). Introduction to microlithography: Theory, materials, and processing. The Society.

Chicago-Zitierstil (17. Ausg.)

American Chemical Society. Division of Organic Coatings and Plastics Chemistry, American Chemical Society. Meeting, L. F. Thompson, C. G. Willson, und M. J. Bowden. Introduction to Microlithography: Theory, Materials, and Processing. Washington, D.C.: The Society, 1983.

MLA-Zitierstil (8. Ausg.)

American Chemical Society. Division of Organic Coatings and Plastics Chemistry, et al. Introduction to Microlithography: Theory, Materials, and Processing. The Society, 1983.