Introduction to microlithography : theory, materials, and processing /

Introduction to microlithography : theory, materials, and processing /

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Bibliographic Details
Corporate Authors: American Chemical Society. Division of Organic Coatings and Plastics Chemistry, American Chemical Society. Meeting
Other Authors: Thompson, L. F., 1944-, Willson, C. G. (C. Grant), 1939-, Bowden, M. J., 1943-
Format: Book
Language:English
Published: Washington, D.C. : The Society, 1983.
Series:ACS symposium series ; 219.
Subjects:
Microlithography > Congresses.
Photoresists > Congresses.
Plasma etching > Congresses.
Semiconductors > Etching > Congresses.
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245 0 0 |a Introduction to microlithography :  |b theory, materials, and processing /  |c L.F. Thompson, editor, C.G. Willson, editor, M.J. Bowden, editor ; based on a workshop sponsored by the ACS Division of Organic Coatings and Plastics Chemistry at the 185th Meeting of the American Chemical Society, Seattle, Washington, March 20-25, 1983. 
260 |a Washington, D.C. :  |b The Society,  |c 1983. 
300 |a ix, 363 p. :  |b ill. ;  |c 24 cm. 
440 0 |a ACS symposium series ;  |v 219. 
504 |a Includes bibliographical references and index. 
505 0 |a An introduction to lithography / L.F. Thompson -- The lithographic process--the physics / L.F. Thompson and M.J. Bowden -- Organic resist materials--theory and chemistry / C. Grant Willson -- Resist processing / L.F. Thompson and M.J. Bowden -- Plasma etching / J.A. Mucha and D.W. Hess -- Multi-layer resist systems / B.J. Lin. 
650 0 |a Microlithography  |v Congresses. 
650 0 |a Photoresists  |x Congresses. 
650 0 |a Plasma etching  |x Congresses. 
650 0 |a Semiconductors  |x Etching  |x Congresses. 
700 1 |a Thompson, L. F.,  |d 1944- 
700 1 |a Willson, C. G.  |q (C. Grant),  |d 1939- 
700 1 |a Bowden, M. J.,  |d 1943- 
710 2 |a American Chemical Society.  |b Division of Organic Coatings and Plastics Chemistry 
710 2 |a American Chemical Society.  |b Meeting  |n (185th :,  |d 1983 :  |c Seattle, Wash.) 
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