Institute for Applied Technology (U.S.). Electronic Technology Division. Semiconductor measurement technology. U.S. Dept. of Commerce, National Bureau of Standards; [for sale by the Supt. of Docs., U.S. Govt. Print. Off.].
Chicago-Zitierstil (17. Ausg.)Institute for Applied Technology (U.S.). Electronic Technology Division. Semiconductor Measurement Technology. [Washington]: U.S. Dept. of Commerce, National Bureau of Standards; [for sale by the Supt. of Docs., U.S. Govt. Print. Off.].
MLA-Zitierstil (8. Ausg.)Institute for Applied Technology (U.S.). Electronic Technology Division. Semiconductor Measurement Technology. U.S. Dept. of Commerce, National Bureau of Standards; [for sale by the Supt. of Docs., U.S. Govt. Print. Off.].
Achtung: Diese Zitate sind unter Umständen nicht zu 100% korrekt.