Semiconductor measurement technology. quarterly report.
Saved in:
| New Title: | Institute for Applied Technology (U.S.). Electronic Technology Division. Semiconductor measurement technology: progress report |
|---|---|
| Previous Title: | United States. National Bureau of Standards. Methods of measurement for semiconductor materials, process control, and devices; quarterly report |
| Corporate Author: | |
| Format: | Journal |
| Language: | English |
| Published: |
[Washington] :
U.S. Dept. of Commerce, National Bureau of Standards; [for sale by the Supt. of Docs., U.S. Govt. Print. Off.].
|
| Series: | NBS special publication
|
| Subjects: |
| Published: | July/Sept. 1973-July/Sept. 1974. |
|---|---|
| Item Description: | Title varies slightly. |
| Physical Description: | v. : ill. ; 26 cm. |
| Publication Frequency: | Quarterly |
| ISSN: | 0145-4676 0090-8541 |