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| LEADER |
01790cas a2200385 a 4500 |
| 001 |
c000224075 |
| 003 |
CARM |
| 005 |
20060929161337.0 |
| 008 |
750613d19731974dcuqr p f0 a0eng |
| 010 |
|
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|a 75601512
|
| 019 |
1 |
|
|a 145150
|5 LACONCORD2021
|
| 022 |
|
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|a 0145-4676
|
| 035 |
|
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|a (OCoLC)2743984
|5 LACONCORD2021
|
| 040 |
|
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|a LC
|b eng
|c LC
|d LC
|
| 042 |
|
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|a lc
|a nsdp
|
| 050 |
0 |
0 |
|a QC100
|b .U57 subser
|a TK7871.85
|
| 082 |
0 |
4 |
|a 621.3815/2/028
|
| 110 |
2 |
|
|a Institute for Applied Technology (U.S.).
|b Electronic Technology Division.
|
| 222 |
|
0 |
|a Semiconductor measurement technology. Quarterly report
|
| 245 |
1 |
0 |
|a Semiconductor measurement technology.
|p quarterly report.
|
| 260 |
|
|
|a [Washington] :
|b U.S. Dept. of Commerce, National Bureau of Standards; [for sale by the Supt. of Docs., U.S. Govt. Print. Off.].
|
| 300 |
|
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|a v. :
|b ill. ;
|c 26 cm.
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| 310 |
|
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|a Quarterly
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| 362 |
0 |
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|a July/Sept. 1973-July/Sept. 1974.
|
| 440 |
|
0 |
|a NBS special publication
|
| 500 |
|
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|a Title varies slightly.
|
| 650 |
|
0 |
|a Semiconductors
|x Testing
|x Periodicals.
|
| 760 |
0 |
|
|t NBS special publication
|
| 780 |
0 |
0 |
|a United States. National Bureau of Standards.
|t Methods of measurement for semiconductor materials, process control, and devices; quarterly report
|x 0090-8541
|w (DLC) 73642169
|w ((OCoLC)1785723
|
| 785 |
0 |
0 |
|a Institute for Applied Technology (U.S.). Electronic Technology Division.
|t Semiconductor measurement technology: progress report
|w (DLC) 80646639
|w (OCoLC)2980496
|
| 852 |
8 |
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|b CARM
|h A2:AF37H0
|i F01034
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| 866 |
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|a (1974:02/06)
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| 866 |
|
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|a (1974:02/06)
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| 952 |
f |
f |
|p Can circulate
|a CAVAL
|b CAVAL
|c CAVAL
|d CARM 1 Store
|e F01034
|f A2:AF37H0
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|i book
|k (1974:02/06)
|m 0315297
|