Emerging semiconductor technology : a symposium /

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Bibliografiske detaljer
Corporate Authors: ASTM Committee F-1 on Electronics, Symposium on Semiconductor Processing
Andre forfattere: Gupta, D. C. (Dinesh C.), Langer, Paul H.
Format: Conference Proceeding Bog
Sprog:English
Udgivet: Philadelphia, PA : American Society for Testing and Materials, c1987.
Serier:ASTM special technical publication ; 960
Fag:
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050 0 0 |a TK7871.85  |b .E47 1987 
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245 0 0 |a Emerging semiconductor technology :  |b a symposium /  |c sponsored by ASTM Committee F-1 on Electronics, San Jose, CA, 28-31 Jan. 1986 ; Dinesh C. Gupta and Paul H. Langer, editors. 
260 |a Philadelphia, PA :  |b American Society for Testing and Materials,  |c c1987. 
300 |a 704 p. :  |b ill. ;  |c 24 cm. 
440 0 |a ASTM special technical publication ;  |v 960 
500 |a Papers presented at the Fourth International Symposium on Semiconductor Processing. 
500 |a "ASTM publication code number (PCN) 04-960000-46." 
504 |a Includes bibliographies and indexes. 
650 0 |a Semiconductor industry  |x Congresses. 
650 0 |a Semiconductors  |x Design and construction  |x Congresses. 
700 1 |a Gupta, D. C.  |q (Dinesh C.) 
700 1 |a Langer, Paul H. 
710 2 |a ASTM Committee F-1 on Electronics. 
711 2 |a Symposium on Semiconductor Processing  |n (4th :  |d 1986 :  |c San Jose, Calif.) 
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