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| LEADER |
01554cam a2200337 a 4500 |
| 001 |
c000224826 |
| 003 |
CARM |
| 005 |
20061031134842.0 |
| 008 |
861105s1987 paua b 101 0 eng |
| 019 |
1 |
|
|a 4954675
|5 LACONCORD2021
|
| 020 |
|
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|a 0803104596
|
| 035 |
|
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|a (OCoLC)14818366
|5 LACONCORD2021
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| 040 |
|
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|a LC
|b eng
|c LC
|d NUN
|
| 050 |
0 |
0 |
|a TK7871.85
|b .E47 1987
|
| 082 |
0 |
4 |
|a 621.3815/2
|2 19
|
| 245 |
0 |
0 |
|a Emerging semiconductor technology :
|b a symposium /
|c sponsored by ASTM Committee F-1 on Electronics, San Jose, CA, 28-31 Jan. 1986 ; Dinesh C. Gupta and Paul H. Langer, editors.
|
| 260 |
|
|
|a Philadelphia, PA :
|b American Society for Testing and Materials,
|c c1987.
|
| 300 |
|
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|a 704 p. :
|b ill. ;
|c 24 cm.
|
| 440 |
|
0 |
|a ASTM special technical publication ;
|v 960
|
| 500 |
|
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|a Papers presented at the Fourth International Symposium on Semiconductor Processing.
|
| 500 |
|
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|a "ASTM publication code number (PCN) 04-960000-46."
|
| 504 |
|
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|a Includes bibliographies and indexes.
|
| 650 |
|
0 |
|a Semiconductor industry
|x Congresses.
|
| 650 |
|
0 |
|a Semiconductors
|x Design and construction
|x Congresses.
|
| 700 |
1 |
|
|a Gupta, D. C.
|q (Dinesh C.)
|
| 700 |
1 |
|
|a Langer, Paul H.
|
| 710 |
2 |
|
|a ASTM Committee F-1 on Electronics.
|
| 711 |
2 |
|
|a Symposium on Semiconductor Processing
|n (4th :
|d 1986 :
|c San Jose, Calif.)
|
| 852 |
8 |
|
|b CARM
|h A2:AP29A0
|i B06708
|p 0315808
|f BK
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| 999 |
f |
f |
|i 6c02aabe-c1ed-5a60-83a7-ca400cbcaa97
|s 35eb4db2-40bf-537d-b1e8-bd9c1fcbac3a
|
| 952 |
f |
f |
|p Can circulate
|a CAVAL
|b CAVAL
|c CAVAL
|d CARM 1 Store
|e B06708
|f A2:AP29A0
|h Other scheme
|i book
|m 0315808
|