Integrated micro-motion systems : micromachining, control, and applications : a collection of contributions based on lectures presented at the Third Toyota Conference, Aichi, Japan, 22-25 October 1989 /
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| Corporate Author: | |
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| Format: | Conference Proceeding Book |
| Language: | English |
| Published: |
Amsterdam ; New York :
Elsevier,
c1990.
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| Physical Description: | xii, 462 p. : ill. ; 25 cm. |
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| Bibliography: | Includes bibliographical references. |
| ISBN: | 0444884173 |