Bright-chromium linewidth standard, SRM 476, for calibration of optical microscope linewidth measuring systems /

Bright-chromium linewidth standard, SRM 476, for calibration of optical microscope linewidth measuring systems /

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Bibliographische Detailangaben
1. Verfasser: Vezzetti, Carol F.
Weitere Verfasser: Potzick, James E., Varner, Ruth N.
Format: Buch
Sprache:English
Veröffentlicht: Gaithersburg, MD : Washington, DC : U.S. Dept. of Commerce, National Institute of Standards and Technology ; For sale by the Supt. of Docs., U.S. G.P.O., 1991.
Schriftenreihe:Standard reference materials
NIST special publication ; 260-114
Schlagworte:
Microscopes > Calibration > Standards.
Integrated circuits > Masks > Measurement.
Chromium > Spectra > Standards.
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050 0 |a QC100  |b .U57 no. 260-114  |a QH211 
100 1 |a Vezzetti, Carol F. 
245 1 0 |a Bright-chromium linewidth standard, SRM 476, for calibration of optical microscope linewidth measuring systems /  |c Carol F. Vezzetti, Ruth N. Varner, James E. Potzick. 
260 |a Gaithersburg, MD :  |b U.S. Dept. of Commerce, National Institute of Standards and Technology ;  |a Washington, DC :  |b For sale by the Supt. of Docs., U.S. G.P.O.,  |c 1991. 
300 |a xii, 33 p. :  |b ill. ;  |c 28 cm. 
440 0 |a Standard reference materials 
440 0 |a NIST special publication ;  |v 260-114 
500 |a "Issued January 1991." 
504 |a Includes bibliographical references (p. 11-12) 
650 0 |a Microscopes  |x Calibration  |x Standards. 
650 0 |a Integrated circuits  |x Masks  |x Measurement. 
650 0 |a Chromium  |x Spectra  |x Standards. 
700 1 |a Potzick, James E. 
700 1 |a Varner, Ruth N. 
852 8 |b CARM  |h A2:AB20H0  |i F01121  |p 0268140  |f BK 
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952 f f |p Can circulate  |a CAVAL  |b CAVAL  |c CAVAL  |d CARM 1 Store  |e F01121  |f A2:AB20H0  |h Other scheme  |i book  |m 0268140 

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