Evolution of silicon materials characterization : lessons learned for improved manufacturing /

Evolution of silicon materials characterization : lessons learned for improved manufacturing /

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Bibliographic Details
Main Author: Bullis, W. Murray, 1930-
Corporate Author: National Institute of Standards and Technology (U.S.). Semiconductor Electronics Division
Format: Book
Language:English
Published: Gaithersburg, MD : Washington, DC : U.S. Dept. of Commerce, National Institute of Standards and Technology ; For sale by the Supt. of Docs., U.S. G.P.O., 1993.
Series:Semiconductor measurement technology
NIST special publication ; 400-92
Subjects:
Semiconductor wafers > Standards.
Electronics > Materials > Testing.
Silicon.
Description
Item Description:"July 1993."
Physical Description:iv, 27, 201-211 p. : ill. ; 28 cm.
Bibliography:Includes bibliographical references (p. 23-25)

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