Evolution of silicon materials characterization : lessons learned for improved manufacturing /
Saved in:
| Main Author: | |
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| Corporate Author: | |
| Format: | Book |
| Language: | English |
| Published: |
Gaithersburg, MD : Washington, DC :
U.S. Dept. of Commerce, National Institute of Standards and Technology ; For sale by the Supt. of Docs., U.S. G.P.O.,
1993.
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| Series: | Semiconductor measurement technology
NIST special publication ; 400-92 |
| Subjects: |
CARM 1 Store
| Call Number: |
A1:AP37D0 F02178 |
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| Copy 1 | Available Place a Hold |