Evolution of silicon materials characterization : lessons learned for improved manufacturing /
Saved in:
| 主要作者: | |
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| 企业作者: | |
| 格式: | 图书 |
| 语言: | English |
| 出版: |
Gaithersburg, MD : Washington, DC :
U.S. Dept. of Commerce, National Institute of Standards and Technology ; For sale by the Supt. of Docs., U.S. G.P.O.,
1993.
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| 丛编: | Semiconductor measurement technology
NIST special publication ; 400-92 |
| 主题: |
CARM 1 Store
| 索引号: |
A1:AP37D0 F02178 |
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| 复印件 1 | 可用 预订 |