Microelectromechanical systems (MEMS) : microscale thermal phenomena in electronic systems, applications of miocrofabrication to fluid mechanics, mechanics in micro-electro-mechanical systems (MEMS), micromechanical systems : presented at the 1996 International Mechanical Engineering Congress and Exposition, November 17-22, 1996, Atlanta, Georgia /

Microelectromechanical systems (MEMS) : microscale thermal phenomena in electronic systems, applications of miocrofabrication to fluid mechanics, mechanics in micro-electro-mechanical systems (MEMS), micromechanical systems : presented at the 1996 International Mechanical Engineering Congress and Exposition, November 17-22, 1996, Atlanta, Georgia /

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Bibliographic Details
Corporate Authors: American Society of Mechanical Engineers. Dynamic Systems and Control Division, International Mechanical Engineering Congress and Exposition
Other Authors: Avedisian, C. T.
Format: Conference Proceeding Book
Language:English
Published: New York, N.Y. : American Society of Mechanical Engineers, c1996.
Series:DSC (Series) ; vol. 59.
Subjects:
Microelectromechanical systems > Congresses.
Microelectronics > Congresses.
Electromechanical devices > Congresses.
Description
Physical Description:viii, 460 p. : ill. ; 28 cm.
Bibliography:Includes bibliographical references and index.
ISBN:0791815412

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