Microelectromechanical systems (MEMS) : microscale thermal phenomena in electronic systems, applications of miocrofabrication to fluid mechanics, mechanics in micro-electro-mechanical systems (MEMS), micromechanical systems : presented at the 1996 International Mechanical Engineering Congress and Exposition, November 17-22, 1996, Atlanta, Georgia /

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Bibliographic Details
Corporate Authors: American Society of Mechanical Engineers. Dynamic Systems and Control Division, International Mechanical Engineering Congress and Exposition
Other Authors: Avedisian, C. T.
Format: Conference Proceeding Book
Language:English
Published: New York, N.Y. : American Society of Mechanical Engineers, c1996.
Series:DSC (Series) ; vol. 59.
Subjects:
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245 0 0 |a Microelectromechanical systems (MEMS) :  |b microscale thermal phenomena in electronic systems, applications of miocrofabrication to fluid mechanics, mechanics in micro-electro-mechanical systems (MEMS), micromechanical systems : presented at the 1996 International Mechanical Engineering Congress and Exposition, November 17-22, 1996, Atlanta, Georgia /  |c sponsored by the Dynamic Systems and Control Division, ASME ... [et al.] ; organizers, C. Thomas Avedisian ... [et al.]. 
260 |a New York, N.Y. :  |b American Society of Mechanical Engineers,  |c c1996. 
300 |a viii, 460 p. :  |b ill. ;  |c 28 cm. 
490 1 |a DSC ;  |v vol. 59 
504 |a Includes bibliographical references and index. 
650 0 |a Microelectromechanical systems  |v Congresses. 
650 0 |a Microelectronics  |v Congresses. 
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700 1 |a Avedisian, C. T. 
710 2 |a American Society of Mechanical Engineers.  |b Dynamic Systems and Control Division 
711 2 |a International Mechanical Engineering Congress and Exposition  |d (1996 :  |c Atlanta, Ga.) 
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