rdf-syntax-grammar
mods:
  schema location: http://www.loc.gov/mods/v3 http://www.loc.gov/standards/mods/v3/mods-3-2.xsd
  title info:
    title: Microelectromechanical systems (MEMS)
    sub title: microscale thermal phenomena in electronic systems, applications of miocrofabrication to fluid mechanics, mechanics in micro-electro-mechanical systems (MEMS), micromechanical systems : presented at the 1996 International Mechanical Engineering Congress and Exposition, November 17-22, 1996, Atlanta, Georgia
  name:
    name part: Avedisian, C. T.
  name:
    name part: American Society of Mechanical Engineers
    name part: Dynamic Systems and Control Division
  name:
    name part: International Mechanical Engineering Congress and Exposition (1996 : Atlanta, Ga.)
  type of resource: text
  genre: bibliography
  genre: conference publication
  origin info:
    place:
      place term: nyu
    place:
      place term: New York, N.Y
    publisher: American Society of Mechanical Engineers
    date issued: c1996
    date issued: 1996
    issuance: monographic
  language:
    language term: eng
  physical description:
    form: print
    extent: viii, 460 p. : ill. ; 28 cm.
  note: sponsored by the Dynamic Systems and Control Division, ASME ... [et al.] ; organizers, C. Thomas Avedisian ... [et al.].
  note: Includes bibliographical references and index.
  subject:
    topic: Microelectromechanical systems
    genre: Congresses
  subject:
    topic: Microelectronics
    genre: Congresses
  subject:
    topic: Electromechanical devices
    genre: Congresses
  classification: TK7874 .M4674 1996
  classification: 621
  related item:
    title info:
      title: DSC (Series) ; vol. 59
  identifier: 0791815412
  identifier: 96078683
  location:
    physical location: CARM
  record info:
    record content source: TxHU
    record creation date: 960927
    record change date: 20070621134909.0
    record identifier: c000263185
    language of cataloging:
      language term: eng