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| LEADER |
01701cam a2200361 a 4500 |
| 001 |
c000265192 |
| 003 |
CARM |
| 005 |
20070724130119.0 |
| 008 |
960604s1995 waua b 101 0 eng d |
| 010 |
|
|
|a 95070377
|
| 019 |
1 |
|
|a 12302224
|5 LACONCORD2021
|
| 020 |
|
|
|a 0819420085
|
| 035 |
|
|
|a (OCoLC)33474557
|5 LACONCORD2021
|
| 040 |
|
|
|a LC
|b eng
|c LC
|d LC
|
| 042 |
|
|
|a lccopycat
|
| 050 |
0 |
0 |
|a TJ163
|b .M49 1995
|
| 082 |
0 |
0 |
|a 621.3815/2
|2 21
|
| 245 |
0 |
0 |
|a Micromachined devices and components :
|b 23-24 October, 1995, Austin, Texas /
|c Ray Roop, Kevin Chau, chairs/editors ; sponsored by SEMI--Semiconductor Equipment and Materials International, NIST--National Institute of Standards and Technology, SPIE--the International Society for Optical Engineering.
|
| 260 |
|
|
|a Bellingham, Wash. :
|b SPIE,
|c c1995.
|
| 300 |
|
|
|a ix, 296 p. :
|b ill. ;
|c 28 cm.
|
| 490 |
1 |
|
|a Proceedings / SPIE--the International Society for Optical Engineering ;
|v v. 2642
|
| 504 |
|
|
|a Includes bibliographic references and index.
|
| 650 |
|
0 |
|a Microelectromechanical systems
|x Congresses.
|
| 650 |
|
0 |
|a Micromachining
|x Congresses.
|
| 700 |
1 |
|
|a Chau, Kevin.
|
| 700 |
1 |
|
|a Roop, Ray.
|
| 710 |
2 |
|
|a National Institute of Standards and Technology (U.S.)
|
| 710 |
2 |
|
|a Society of Photo-optical Instrumentation Engineers.
|
| 710 |
2 |
|
|a Semiconductor Equipment and Materials International
|
| 830 |
|
0 |
|a Proceedings of SPIE--the International Society for Optical Engineering ;
|v v. 2642.
|
| 852 |
8 |
|
|b CARM
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| 952 |
f |
f |
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|a CAVAL
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