Handbook of surface metrology /
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| Main Author: | |
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| Format: | Book |
| Language: | English |
| Published: |
Bristol ; Philadelphia :
Institute of Physics Pub.,
c1994.
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| Subjects: | |
| Online Access: | Publisher description |
| Physical Description: | xxvi, 988 p. : ill. ; 26 cm. |
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| Bibliography: | Includes bibliographical references and index. |
| ISBN: | 0750300396 |