Vacuum microelectronics 1989 : proceedings of the second International Conference on Vacuum Microelectronics held in Bath, 24-26 July 1989 /
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| Corporate Authors: | , |
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| Other Authors: | |
| Format: | Conference Proceeding Book |
| Language: | English |
| Published: |
Bristol :
Institute of Physics,
1989.
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| Series: | Conference series (Institute of Physics (Great Britain)) ;
99. |
| Subjects: |
| Item Description: | Includes bibliographical references and indexes. Microelectronics industries. Applications of vacuum technology (BNB/PRECIS) |
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| Physical Description: | viii, 238, [5] p. : ill. ; 24 cm. |
| ISBN: | 0854980555 : |