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| 019 |
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|a 1968699
|5 LACONCORD2021
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| 020 |
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|a 0387105212 (v. 1 : U.S.)
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| 020 |
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|a 3540105212 (v.1)
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| 020 |
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|a 3540125930 (v.2)
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| 020 |
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|a 0387125930 (v. 2 : New York)
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| 020 |
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|a 0387534288 (v. 3)
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|a 3540534288 (v. 3 : New York)
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|a (OCoLC)7306737
|5 LACONCORD2021
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| 040 |
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|a LC
|b eng
|c LC
|d LC
|d VCAV
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| 050 |
0 |
0 |
|a QC176.8.S72
|b S68
|
| 082 |
0 |
4 |
|a 530.41
|2 19
|
| 245 |
0 |
0 |
|a Sputtering by particle bombardment /
|c edited by R. Behrisch ; with contributions by H.H. Andersen ... [et al.].
|
| 246 |
3 |
|
|a Particle bombardment
|
| 260 |
|
|
|a Berlin ;
|a New York :
|b Springer-Verlag,
|c 1981-c1991.
|
| 300 |
|
|
|a 3 v. :
|b ill. ;
|c 24 cm.
|
| 440 |
|
0 |
|a Topics in applied physics ;
|v v. 47, 52, 64
|
| 504 |
|
|
|a Includes bibliographical references and indexes.
|
| 505 |
0 |
|
|a Vol. 1. Physical sputtering of single-element solids -- v. 2. Sputtering of alloys and compounds, electron and neutron sputtering, surface topography -- v. 3. Characteristics of sputtered particles, technical applications.
|
| 650 |
|
0 |
|a Sputtering (Physics)
|
| 650 |
|
0 |
|a Solids
|x Effect of radiation on.
|
| 650 |
|
0 |
|a Surfaces (Physics)
|x Effect of radiation on.
|
| 700 |
1 |
|
|a Andersen, Hans Henrik.
|
| 700 |
1 |
|
|a Behrisch, Rainer.
|
| 740 |
0 |
|
|a Particle bombardment.
|
| 852 |
8 |
|
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