Sputtering by particle bombardment /
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Další autoři: | , |
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Médium: | Kniha |
Jazyk: | English |
Vydáno: |
Berlin ; New York :
Springer-Verlag,
1981-c1991.
|
Edice: | Topics in applied physics ;
v. 47, 52, 64 |
Témata: |
Obsah:
- Vol. 1. Physical sputtering of single-element solids
- v. 2. Sputtering of alloys and compounds, electron and neutron sputtering, surface topography
- v. 3. Characteristics of sputtered particles, technical applications.