Sputtering by particle bombardment /
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| Daljnji autori: | , |
|---|---|
| Format: | Knjiga |
| Jezik: | English |
| Izdano: |
Berlin ; New York :
Springer-Verlag,
1981-c1991.
|
| Serija: | Topics in applied physics ;
v. 47, 52, 64 |
| Teme: |
Sadržaj:
- Vol. 1. Physical sputtering of single-element solids
- v. 2. Sputtering of alloys and compounds, electron and neutron sputtering, surface topography
- v. 3. Characteristics of sputtered particles, technical applications.