Sputtering by particle bombardment /

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Bibliographic Details
Other Authors: Andersen, Hans Henrik, Behrisch, Rainer
Format: Book
Language:English
Published: Berlin ; New York : Springer-Verlag, 1981-c1991.
Series:Topics in applied physics ; v. 47, 52, 64
Subjects:
Table of Contents:
  • Vol. 1. Physical sputtering of single-element solids
  • v. 2. Sputtering of alloys and compounds, electron and neutron sputtering, surface topography
  • v. 3. Characteristics of sputtered particles, technical applications.