Sputtering by particle bombardment /
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Other Authors: | , |
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Format: | Book |
Language: | English |
Published: |
Berlin ; New York :
Springer-Verlag,
1981-c1991.
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Series: | Topics in applied physics ;
v. 47, 52, 64 |
Subjects: |
Table of Contents:
- Vol. 1. Physical sputtering of single-element solids
- v. 2. Sputtering of alloys and compounds, electron and neutron sputtering, surface topography
- v. 3. Characteristics of sputtered particles, technical applications.