Sputtering by particle bombardment /
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| 其他作者: | , |
|---|---|
| 格式: | 圖書 |
| 語言: | English |
| 出版: |
Berlin ; New York :
Springer-Verlag,
1981-c1991.
|
| 叢編: | Topics in applied physics ;
v. 47, 52, 64 |
| 主題: |
書本目錄:
- Vol. 1. Physical sputtering of single-element solids
- v. 2. Sputtering of alloys and compounds, electron and neutron sputtering, surface topography
- v. 3. Characteristics of sputtered particles, technical applications.