Stuart, R. V. (1983). Vacuum technology, thin films, and sputtering: An introduction. Academic Press.
Chicago Style (17th ed.) CitationStuart, R. V. Vacuum Technology, Thin Films, and Sputtering: An Introduction. New York: Academic Press, 1983.
MLA (8th ed.) CitationStuart, R. V. Vacuum Technology, Thin Films, and Sputtering: An Introduction. Academic Press, 1983.
Warning: These citations may not always be 100% accurate.