Vacuum technology, thin films, and sputtering : an introduction /
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| Main Author: | |
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| Format: | Book |
| Language: | English |
| Published: |
New York :
Academic Press,
1983.
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| Subjects: | |
| Online Access: | Publisher description Table of contents |
| Item Description: | Includes index. |
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| Physical Description: | viii, 151 p. : ill. ; 24 cm. |
| ISBN: | 0126747806 |