Vacuum technology, thin films, and sputtering : an introduction /
में बचाया:
| मुख्य लेखक: | |
|---|---|
| स्वरूप: | पुस्तक |
| भाषा: | English |
| प्रकाशित: |
New York :
Academic Press,
1983.
|
| विषय: | |
| ऑनलाइन पहुंच: | Publisher description Table of contents |
| LEADER | 01202cam a2200313 a 4500 | ||
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| 003 | CARM | ||
| 005 | 20081110134905.0 | ||
| 008 | 820720s1983 nyua 001 0 eng d | ||
| 010 | |a 82013748 | ||
| 019 | 1 | |a 2290190 |5 LACONCORD2021 | |
| 020 | |a 0126747806 | ||
| 035 | |a (OCoLC)8667288 |5 LACONCORD2021 | ||
| 040 | |a DLC |b eng |c DLC |d DLC |d VCAV | ||
| 050 | 0 | 0 | |a TP156.V3 |b S78 1983 |
| 082 | 0 | 4 | |a 621.55 |2 19 |
| 100 | 1 | |a Stuart, R. V. | |
| 245 | 1 | 0 | |a Vacuum technology, thin films, and sputtering : |b an introduction / |c R.V. Stuart. |
| 260 | |a New York : |b Academic Press, |c 1983. | ||
| 300 | |a viii, 151 p. : |b ill. ; |c 24 cm. | ||
| 500 | |a Includes index. | ||
| 650 | 0 | |a Vacuum technology. | |
| 650 | 0 | |a Thin films. | |
| 650 | 0 | |a Cathode sputtering (Plating process) | |
| 856 | 4 | 2 | |3 Publisher description |u http://www.loc.gov/catdir/description/els032/82013748.html |
| 856 | 4 | 1 | |3 Table of contents |u http://www.loc.gov/catdir/toc/els031/82013748.html |
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