Vacuum mechatronics : first international workshop, Santa Barbara, CA, 1989 /

Vacuum mechatronics : first international workshop, Santa Barbara, CA, 1989 /

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Bibliographic Details
Corporate Authors: American Vacuum Society, International Vacuum Mechatronics Workshop
Other Authors: Belinski, Steven E.
Format: Conference Proceeding Book
Language:English
Published: New York : American Institute of Physics, c1989.
Series:American Vacuum Society series ; 7
AIP conference proceedings ; no. 192.
Subjects:
Vacuum technology > Congresses.
Mechatronics.
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440 0 |a American Vacuum Society series ;  |v 7 
490 1 |a Conference proceedings ;  |v no. 192 
500 |a Papers presented at the First International Vacuum Mechatronics Workshop, held Feb. 2-3, 1989 at the University of California, Santa Barbara. 
504 |a Includes bibliographical references. 
650 0 |a Vacuum technology  |v Congresses. 
650 0 |a Mechatronics. 
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