Handbook of thin film process technology /

Handbook of thin film process technology /

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Bibliographic Details
Other Authors: Glocker, David A., Shah, S. Ismat, Westwood, William D. 1937-
Format: Book
Language:English
Published: Bristol, UK ; Philadelphia : Institute of Physics Pub., c1995.
Subjects:
Thin films > Handbooks, manuals, etc.
Surfaces (Technology) > Handbooks, manuals, etc.
Online Access:Publisher description
Description
Item Description:Accompanied by : 98/1 Reactive sputtering / guest editor, William D. Westwood. 1998. 18 p. (looseleaf in envelope) : ill. ; 30 cm.
Accompanied by : 98/2 Recipes for optical materials /editors, David A. Glocker, S. Ismat Shah. 1998. 1 v. (various pagings) (looseleaf in envelope) : ill. ; 31 cm.
Physical Description:1 v. (various pagings) : ill. ; 31 cm.
Bibliography:Includes bibliographical references and indexes.
ISBN:0750303115
0750308311 (v.1)
075030832x (v.2)

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