Handbook of thin film process technology /

Handbook of thin film process technology /

Shranjeno v:
Bibliografske podrobnosti
Drugi avtorji: Glocker, David A., Shah, S. Ismat, Westwood, William D. 1937-
Format: Knjiga
Jezik:English
Izdano: Bristol, UK ; Philadelphia : Institute of Physics Pub., c1995.
Teme:
Thin films > Handbooks, manuals, etc.
Surfaces (Technology) > Handbooks, manuals, etc.
Online dostop:Publisher description
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245 0 0 |a Handbook of thin film process technology /  |c editors, David A. Glocker, S. Ismat Shah. 
246 3 |a Thin film process technology 
260 |a Bristol, UK ;  |a Philadelphia :  |b Institute of Physics Pub.,  |c c1995. 
300 |a 1 v. (various pagings) :  |b ill. ;  |c 31 cm. 
500 |a Accompanied by : 98/1 Reactive sputtering / guest editor, William D. Westwood. 1998. 18 p. (looseleaf in envelope) : ill. ; 30 cm. 
500 |a Accompanied by : 98/2 Recipes for optical materials /editors, David A. Glocker, S. Ismat Shah. 1998. 1 v. (various pagings) (looseleaf in envelope) : ill. ; 31 cm. 
504 |a Includes bibliographical references and indexes. 
650 0 |a Thin films  |v Handbooks, manuals, etc. 
650 0 |a Surfaces (Technology)  |v Handbooks, manuals, etc. 
700 1 |a Glocker, David A. 
700 1 |a Shah, S. Ismat. 
700 1 |a Westwood, William D.  |s (William Dickson),  |d 1937- 
730 0 |a 98/1 Reactive sputtering. 
730 0 |a 98/2 Recipes for optical materials. 
740 0 2 |a Reactive sputtering. 
856 4 2 |3 Publisher description  |u http://www.loc.gov/catdir/enhancements/fy0713/95237129-d.html 
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