Society of Photo-optical Instrumentation Engineers, Chen, R. T., Lowell, J., & Mathur, J. P. (1996). Optical characterization techniques for high-performance microelectronic device manufacturing III: 16-17 October 1996, Austin, Texas. SPIE.
Čikaški stil citiranja (17. izdanje)Society of Photo-optical Instrumentation Engineers, Ray T. Chen, John Lowell, i Jagdish P. Mathur. Optical Characterization Techniques for High-performance Microelectronic Device Manufacturing III: 16-17 October 1996, Austin, Texas. Bellingham, Wash.: SPIE, 1996.
MLA način citiranja (8. izdanje)Society of Photo-optical Instrumentation Engineers, et al. Optical Characterization Techniques for High-performance Microelectronic Device Manufacturing III: 16-17 October 1996, Austin, Texas. SPIE, 1996.
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