Стиль цитування APA (7-ме видання)

Society of Photo-optical Instrumentation Engineers, Chen, R. T., Lowell, J., & Mathur, J. P. (1996). Optical characterization techniques for high-performance microelectronic device manufacturing III: 16-17 October 1996, Austin, Texas. SPIE.

Чикаго стиль цитування (17-те видання)

Society of Photo-optical Instrumentation Engineers, Ray T. Chen, John Lowell, та Jagdish P. Mathur. Optical Characterization Techniques for High-performance Microelectronic Device Manufacturing III: 16-17 October 1996, Austin, Texas. Bellingham, Wash.: SPIE, 1996.

Стиль цитування MLA (8-ме видання)

Society of Photo-optical Instrumentation Engineers, et al. Optical Characterization Techniques for High-performance Microelectronic Device Manufacturing III: 16-17 October 1996, Austin, Texas. SPIE, 1996.