APA引文

Society of Photo-optical Instrumentation Engineers, Chen, R. T., Lowell, J., & Mathur, J. P. (1996). Optical characterization techniques for high-performance microelectronic device manufacturing III: 16-17 October 1996, Austin, Texas. SPIE.

Chicago Style (17th ed.) Citation

Society of Photo-optical Instrumentation Engineers, Ray T. Chen, John Lowell, and Jagdish P. Mathur. Optical Characterization Techniques for High-performance Microelectronic Device Manufacturing III: 16-17 October 1996, Austin, Texas. Bellingham, Wash.: SPIE, 1996.

MLA引文

Society of Photo-optical Instrumentation Engineers, et al. Optical Characterization Techniques for High-performance Microelectronic Device Manufacturing III: 16-17 October 1996, Austin, Texas. SPIE, 1996.