Optical characterization techniques for high-performance microelectronic device manufacturing III : 16-17 October 1996, Austin, Texas /
Wedi'i Gadw mewn:
Awdur Corfforaethol: | |
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Awduron Eraill: | , , |
Fformat: | Llyfr |
Iaith: | English |
Cyhoeddwyd: |
Bellingham, Wash. :
SPIE,
1996.
|
Cyfres: | Proceedings of SPIE--the International Society for Optical Engineering ;
v. 2877. |
Pynciau: |
Disgrifiad Corfforoll: | ix, 218 p. : ill. ; 28 cm. |
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Llyfryddiaeth: | Includes bibliographical references and index. |
ISBN: | 0819422754 |