Optical characterization techniques for high-performance microelectronic device manufacturing III : 16-17 October 1996, Austin, Texas /

Gorde:
Xehetasun bibliografikoak
Erakunde egilea: Society of Photo-optical Instrumentation Engineers
Beste egile batzuk: Chen, Ray T., Lowell, John, Mathur, Jagdish P.
Formatua: Liburua
Hizkuntza:English
Argitaratua: Bellingham, Wash. : SPIE, 1996.
Saila:Proceedings of SPIE--the International Society for Optical Engineering ; v. 2877.
Gaiak:
Deskribapena
Deskribapen fisikoa:ix, 218 p. : ill. ; 28 cm.
Bibliografia:Includes bibliographical references and index.
ISBN:0819422754