Optical characterization techniques for high-performance microelectronic device manufacturing III : 16-17 October 1996, Austin, Texas /
Gardado en:
Autor Corporativo: | |
---|---|
Outros autores: | , , |
Formato: | Libro |
Idioma: | English |
Publicado: |
Bellingham, Wash. :
SPIE,
1996.
|
Series: | Proceedings of SPIE--the International Society for Optical Engineering ;
v. 2877. |
Subjects: |
Descrición Física: | ix, 218 p. : ill. ; 28 cm. |
---|---|
Bibliografía: | Includes bibliographical references and index. |
ISBN: | 0819422754 |