Optical characterization techniques for high-performance microelectronic device manufacturing III : 16-17 October 1996, Austin, Texas /
Gorde:
Erakunde egilea: | |
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Beste egile batzuk: | , , |
Formatua: | Liburua |
Hizkuntza: | English |
Argitaratua: |
Bellingham, Wash. :
SPIE,
1996.
|
Saila: | Proceedings of SPIE--the International Society for Optical Engineering ;
v. 2877. |
Gaiak: |
Deskribapen fisikoa: | ix, 218 p. : ill. ; 28 cm. |
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Bibliografia: | Includes bibliographical references and index. |
ISBN: | 0819422754 |