Optical characterization techniques for high-performance microelectronic device manufacturing III : 16-17 October 1996, Austin, Texas /
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| 企业作者: | |
|---|---|
| 其他作者: | , , |
| 格式: | 图书 |
| 语言: | English |
| 出版: |
Bellingham, Wash. :
SPIE,
1996.
|
| 丛编: | Proceedings of SPIE--the International Society for Optical Engineering ;
v. 2877. |
| 主题: |
| 实物描述: | ix, 218 p. : ill. ; 28 cm. |
|---|---|
| 参考书目: | Includes bibliographical references and index. |
| ISBN: | 0819422754 |