Optical characterization techniques for high-performance microelectronic device manufacturing III : 16-17 October 1996, Austin, Texas /

Optical characterization techniques for high-performance microelectronic device manufacturing III : 16-17 October 1996, Austin, Texas /

Kaydedildi:
Detaylı Bibliyografya
Müşterek Yazar: Society of Photo-optical Instrumentation Engineers
Diğer Yazarlar: Chen, Ray T., Lowell, John, Mathur, Jagdish P.
Materyal Türü: Kitap
Dil:English
Baskı/Yayın Bilgisi: Bellingham, Wash. : SPIE, 1996.
Seri Bilgileri:Proceedings of SPIE--the International Society for Optical Engineering ; v. 2877.
Konular:
Integrated circuits industry > Congresses.
Manufacturing processes > Congresses.
Semiconductors > Design and construction > Congresses.
Integrated circuits > Design and construction > Congresses.
Semiconductors > Testing > Optical methods > Congresses.
Optical detectors > Congresses.
Diğer Bilgiler
Fiziksel Özellikler:ix, 218 p. : ill. ; 28 cm.
Bibliyografya:Includes bibliographical references and index.
ISBN:0819422754

Benzer Materyaller