Optical characterization techniques for high-performance microelectronic device manufacturing III : 16-17 October 1996, Austin, Texas /
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| 企業作者: | |
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| 其他作者: | , , |
| 格式: | 圖書 |
| 語言: | English |
| 出版: |
Bellingham, Wash. :
SPIE,
1996.
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| 叢編: | Proceedings of SPIE--the International Society for Optical Engineering ;
v. 2877. |
| 主題: |
CARM 1 Store
| 索引號: |
A3:AE31C0 F06472 |
|---|---|
| 復印件 1 | 可用 預訂 |