Database for and statistical analysis of the interlaboratory determination of the conversion coefficient for the measurement of the interstitial oxygen content of silicon by infrared absorption /

Database for and statistical analysis of the interlaboratory determination of the conversion coefficient for the measurement of the interstitial oxygen content of silicon by infrared absorption /

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Bibliographic Details
Corporate Author: National Institute of Standards and Technology (U.S.)
Other Authors: Baghdadi, A., Scace, Robert I., Walters, E. Jane
Format: Book
Language:English
Published: Gaithersburg, Md. : Washington, DC : U.S. Dept. of Commerce, National Institute of Standards and Technology ; For sale by the Supt. of Docs., U.S. G.P.O., 1989.
Series:Semiconductor measurement technology
NIST special publication ; 400-82
Subjects:
Silicon > Measurement > Databases.
Silicon > Measurement > Statistical methods.
Oxygen > Measurement > Databases.
Oxygen > Measurement > Statistical methods.
Infrared spectroscopy > Databases.
Infrared spectroscopy > Statistical methods.
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245 0 0 |a Database for and statistical analysis of the interlaboratory determination of the conversion coefficient for the measurement of the interstitial oxygen content of silicon by infrared absorption /  |c Aslan Baghdadi, Robert I. Scace, and E. Jane Walters, editors. 
260 |a Gaithersburg, Md. :  |b U.S. Dept. of Commerce, National Institute of Standards and Technology ;  |a Washington, DC :  |b For sale by the Supt. of Docs., U.S. G.P.O.,  |c 1989. 
300 |a x, 168 p. :  |b ill. ;  |c 28 cm. 
490 1 |a Semiconductor measurement technology 
490 1 |a NIST special publication ;  |v 400-82 
500 |a "July 1989." 
504 |a Includes bibliographical references. 
650 0 |a Silicon  |x Measurement  |v Databases. 
650 0 |a Silicon  |x Measurement  |x Statistical methods. 
650 0 |a Oxygen  |x Measurement  |v Databases. 
650 0 |a Oxygen  |x Measurement  |x Statistical methods. 
650 0 |a Infrared spectroscopy  |v Databases. 
650 0 |a Infrared spectroscopy  |x Statistical methods. 
700 1 |a Baghdadi, A. 
700 1 |a Scace, Robert I. 
700 1 |a Walters, E. Jane. 
710 2 |a National Institute of Standards and Technology (U.S.) 
830 0 |a Semiconductor measurement technology 
830 0 |a NIST special publication ;  |v 400-82 
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