Evaluating a chip, wafer, or lot using SUXES, SPICE, and STAT2 /
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| Main Author: | |
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| Format: | Book |
| Language: | English |
| Published: |
Gaithersburg, MD : Washington, DC :
U.S. Dept. of Commerce, Technology Administration, National Institute of Standards and Technology ; For sale by the Supt. of Docs., U.S. G.P.O.,
1992.
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| Series: | Semiconductor measurement technology
NIST special publication ; 400-90 |
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| Item Description: | "April 1992." |
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| Physical Description: | iv, 140 p. : ill. ; 28 cm. |
| Bibliography: | Includes bibliographical references (p. 41-42) |