Evaluating a chip, wafer, or lot using SUXES, SPICE, and STAT2 /
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| Hlavní autor: | |
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| Médium: | Kniha |
| Jazyk: | English |
| Vydáno: |
Gaithersburg, MD : Washington, DC :
U.S. Dept. of Commerce, Technology Administration, National Institute of Standards and Technology ; For sale by the Supt. of Docs., U.S. G.P.O.,
1992.
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| Edice: | Semiconductor measurement technology
NIST special publication ; 400-90 |
| Témata: |
| Popis jednotky: | "April 1992." |
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| Fyzický popis: | iv, 140 p. : ill. ; 28 cm. |
| Bibliografie: | Includes bibliographical references (p. 41-42) |