Evaluating a chip, wafer, or lot using SUXES, SPICE, and STAT2 /

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Podrobná bibliografie
Hlavní autor: Marshall, J. C. (Janet C.)
Korporativní autor: National Institute of Standards and Technology (U.S.)
Další autoři: Mattis, Richard L.
Médium: Kniha
Jazyk:English
Vydáno: Gaithersburg, MD : Washington, DC : U.S. Dept. of Commerce, Technology Administration, National Institute of Standards and Technology ; For sale by the Supt. of Docs., U.S. G.P.O., 1992.
Edice:Semiconductor measurement technology
NIST special publication ; 400-90
Témata:
Popis
Popis jednotky:"April 1992."
Fyzický popis:iv, 140 p. : ill. ; 28 cm.
Bibliografie:Includes bibliographical references (p. 41-42)