Semiconductor measurement technology : thin film reference materials development final report for CRADA CN-1364 /
Wedi'i Gadw mewn:
Fformat: | Llyfr |
---|---|
Iaith: | Undetermined |
Cyhoeddwyd: |
Gaithersburg, MD :
U.S. Dept. of Commerce, Technology Administration, National Institute of Standards and Technology,
1998.
|
Cyfres: | 830NIST special publication ;
400-100 |
Pynciau: |
Disgrifiad Corfforoll: | 38 p. ; 29 cm. |
---|