Semiconductor measurement technology : thin film reference materials development final report for CRADA CN-1364 /
Saved in:
| Format: | Bog |
|---|---|
| Sprog: | Undetermined |
| Udgivet: |
Gaithersburg, MD :
U.S. Dept. of Commerce, Technology Administration, National Institute of Standards and Technology,
1998.
|
| Serier: | 830NIST special publication ;
400-100 |
| Fag: |
| Fysisk beskrivelse: | 38 p. ; 29 cm. |
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