Semiconductor measurement technology : thin film reference materials development final report for CRADA CN-1364 /

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Bibliografiske detaljer
Format: Bog
Sprog:Undetermined
Udgivet: Gaithersburg, MD : U.S. Dept. of Commerce, Technology Administration, National Institute of Standards and Technology, 1998.
Serier:830NIST special publication ; 400-100
Fag:
Beskrivelse
Fysisk beskrivelse:38 p. ; 29 cm.