Semiconductor measurement technology : thin film reference materials development final report for CRADA CN-1364 /
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| Format: | Book |
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| Language: | Undetermined |
| Published: |
Gaithersburg, MD :
U.S. Dept. of Commerce, Technology Administration, National Institute of Standards and Technology,
1998.
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| Series: | 830NIST special publication ;
400-100 |
| Subjects: |
| Physical Description: | 38 p. ; 29 cm. |
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