Semiconductor measurement technology : thin film reference materials development final report for CRADA CN-1364 /
Enregistré dans:
| Format: | Livre |
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| Langue: | Undetermined |
| Publié: |
Gaithersburg, MD :
U.S. Dept. of Commerce, Technology Administration, National Institute of Standards and Technology,
1998.
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| Collection: | 830NIST special publication ;
400-100 |
| Sujets: |
| Description matérielle: | 38 p. ; 29 cm. |
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