Semiconductor measurement technology : thin film reference materials development final report for CRADA CN-1364 /
Salvato in:
| Natura: | Libro |
|---|---|
| Lingua: | Undetermined |
| Pubblicazione: |
Gaithersburg, MD :
U.S. Dept. of Commerce, Technology Administration, National Institute of Standards and Technology,
1998.
|
| Serie: | 830NIST special publication ;
400-100 |
| Soggetti: |
| Descrizione fisica: | 38 p. ; 29 cm. |
|---|