Semiconductor measurement technology : thin film reference materials development final report for CRADA CN-1364 /
保存先:
| フォーマット: | 図書 |
|---|---|
| 言語: | Undetermined |
| 出版事項: |
Gaithersburg, MD :
U.S. Dept. of Commerce, Technology Administration, National Institute of Standards and Technology,
1998.
|
| シリーズ: | 830NIST special publication ;
400-100 |
| 主題: |
| 物理的記述: | 38 p. ; 29 cm. |
|---|