Semiconductor measurement technology : thin film reference materials development final report for CRADA CN-1364 /
Сохранить в:
| Формат: | |
|---|---|
| Язык: | Undetermined |
| Опубликовано: |
Gaithersburg, MD :
U.S. Dept. of Commerce, Technology Administration, National Institute of Standards and Technology,
1998.
|
| Серии: | 830NIST special publication ;
400-100 |
| Предметы: |
| Объем: | 38 p. ; 29 cm. |
|---|